Metals for Semiconductor: Cleanroom and Process Equipment Guide

Metals for Semiconductor: Cleanroom and Process Equipment Guide

Short answer: Semiconductor tools need ultra-clean, low-outgassing metals – electropolished 316L, high-purity aluminum, titanium and copper – so buyers specify surface finish and purity; our Stainless Steel Supplier y Surface Treatment Guide give the supporting detail.

At a Glance

Metals for Semiconductor: Cleanroom and Process Equipment Guide chart
Figure 1 – Metals for Semiconductor: Cleanroom and Process Equipment Guide overview.

Cleanliness and Purity

Chambers and gas lines use Stainless Steel Supplier 316L electropolished, with finishes in our Surface Treatment Guide and corrosion notes in our Corrosion Resistance Guide.

Targets and Conductors

Sputter targets and conductors use Copper Supplier, Titanium Supplier y Aluminum Supplier, a quick spec summary is below.

Part Grado Requirement
Chamber 316L EP Ra < 0.4
Target Cu 4N Purity
Frame 6061 Light

Inspection and Certification

Check finish and purity, with tests in our Quality Inspection Guide and certification in our Mill Test Certificate Guide.

Procurement Tips

Share the cleanliness class and standard, and pack clean with our Export Packing Guide.

Get a Quote

Tell HXSCO your requirements and we will respond with a competitive quote and lead time.

Preguntas frecuentes

Which stainless for cleanrooms?

316L electropolished for low outgassing.

Why aluminum in semiconductor tools?

Light, easily pumped vacuum parts.

What is a sputter target?

High-purity Cu, Ti or Al source material.

How clean must surfaces be?

Electropolished, Ra below 0.4 micron.

Do you certify purity?

Yes – purity and material certificates provided.

Supply Semiconductor Metals from HXSCO

HXSCO supplies 316L EP stainless, high-purity aluminum, titanium and copper for semiconductor tools. Send grade, finish and quantity for a quote.

Request a Quote