Short answer: Semiconductor tools need ultra-clean, low-outgassing metals – electropolished 316L, high-purity aluminum, titanium and copper – so buyers specify surface finish and purity; our Stainless Steel Supplier и Surface Treatment Guide give the supporting detail.
At a Glance
Cleanliness and Purity
Chambers and gas lines use Stainless Steel Supplier 316L electropolished, with finishes in our Surface Treatment Guide and corrosion notes in our Corrosion Resistance Guide.
Targets and Conductors
Sputter targets and conductors use Copper Supplier, Titanium Supplier и Aluminum Supplier, a quick spec summary is below.
| Part | Класс | Requirement |
|---|---|---|
| Chamber | 316L EP | Ra < 0.4 |
| Target | Cu 4N | Purity |
| Frame | 6061 | Light |
Inspection and Certification
Check finish and purity, with tests in our Quality Inspection Guide and certification in our Mill Test Certificate Guide.
Procurement Tips
Share the cleanliness class and standard, and pack clean with our Export Packing Guide.
Get a Quote
Tell HXSCO your requirements and we will respond with a competitive quote and lead time.
Часто задаваемые вопросы
316L electropolished for low outgassing.
Light, easily pumped vacuum parts.
High-purity Cu, Ti or Al source material.
Electropolished, Ra below 0.4 micron.
Yes – purity and material certificates provided.
Supply Semiconductor Metals from HXSCO
HXSCO supplies 316L EP stainless, high-purity aluminum, titanium and copper for semiconductor tools. Send grade, finish and quantity for a quote.